This nanopositioning system features a clear aperture with a 30 mm diameter, travel ranges to 80 µm, and a very stiff mechanical design for fast response and high scanning frequencies. It’s been designed to provide precise optical element positioning for micromachining, microstructuring, and scanning applications.
PI’s P-630 is a 1 axis, flexure-guided nanopositioning system that is directly driven and includes a capacitive position sensor to provide maximum stability and linearity. Its integrated piezoceramic actuators have an all-ceramic insulation, resulting in actuators that are resistant to humidity, have a longer lifetime, and can operate at temperatures up to 80oC.
For more information on the P-630 high-dynamics nanopositioning system, download the datasheet.